보유기술

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레이저에칭 필요성

레이저에칭 필요성 High efficiency microthermal and microfluidic devices based on microgroove

- Microgroove structure with high-aspect-ratio
- Triangular or rectangular cross-sectional profiles
- Good surface quality with no burr and debris
Micro heat pipe
Micro heat spreader
Wick structures
Necessity of metallic microfabrication technique
-  High-aspect-ratio structure
-  Little heat affected zone
-  Desired cross-section (U-shaped, V-shaped groove)
Triangular cross-section
Rectangular cross-section
Laser etching technique is recommended
Laser etching

레이저에칭 원리

레이저에칭 원리 Laser beam irradiation
Heat absorption
Workpiece heating
Workpiece-Etchant
Chemical reaction
Removed material
Micromachining
Governing Equation
R(T)=C∙exp(-QA/Rg∙T)
R: Reaction rate
C: Constant
QA: Activation energy
Rg: Gas constant
T: Temperature

Groove 제조결과

Groove 제조결과 Microgrooves Fabrication
Single Process
Multiple Process

Hole 제조결과

Hole 제조결과 Microholes Fabrication
Oscillatory Process
Fabrication Procedure
Surface Morphology
(e≈0.048)

Device 제조결과

Device 제조결과 Microdevices Fabrication
Photonic Device Application
Renewable Energy Device Application 
Direct-Written Letters
Microthermal Devices